Key Applications
- Semiconductor Manufacturing
- CVD/ALD Processes: Deposits epitaxial silicon layers for 3nm-node logic chips and DRAM capacitors.
- Dielectric Films: Forms SiO₂/SiNₓ layers in MEMS sensors and power devices.
- Photovoltaics
- Solar Cell Production: Creates hydrogenated amorphous silicon (a-Si:H) layers with 23%+ efficiency.
- TCO Coatings: Enhances light transmission in bifacial modules via PECVD.
- Advanced Materials
- Ceramic Matrix Composites: Produces SiC/Si₃N₄ via chemical vapor infiltration (CVI).
- Anti-reflective Coatings:Applied to optical lenses and display panels.
- Safety Innovations
- Diluted blends (1-3% in N₂) for controlled reactivity.
- Integrated flame arrestors and pressure-relief valves.
Technical Specifications
- Purity: 6N (99.9999%) electronic grade
- Density: 1.44 kg/m³ (STP)
- Explosive Range: 1.37–96% in air
- Delivery: Passivated steel cylinders with real-time TDLAS monitoring
Product Specifications
CAS Number: 7803-62-5
UN Number: 2203
EINECS Number: 232-2632-4
Molecular Weight: 32.117
Appearance: Colorless, with a garlic smell
Melting Point: -185 °C
Boiling Point: -112 °C
Density: 1.34 kg/m³
DOT Class: 2.1
Label: Flammable Gas
Key Applications
- Semiconductor Manufacturing
- CVD/ALD Processes: Deposits epitaxial silicon layers for 3nm-node logic chips and DRAM capacitors.
- Dielectric Films: Forms SiO₂/SiNₓ layers in MEMS sensors and power devices.
- Photovoltaics
- Solar Cell Production: Creates hydrogenated amorphous silicon (a-Si:H) layers with 23%+ efficiency.
- TCO Coatings: Enhances light transmission in bifacial modules via PECVD.
- Advanced Materials
- Ceramic Matrix Composites: Produces SiC/Si₃N₄ via chemical vapor infiltration (CVI).
- Anti-reflective Coatings:Applied to optical lenses and display panels.
- Safety Innovations
- Diluted blends (1-3% in N₂) for controlled reactivity.
- Integrated flame arrestors and pressure-relief valves.
Technical Specifications
- Purity: 6N (99.9999%) electronic grade
- Density: 1.44 kg/m³ (STP)
- Explosive Range: 1.37–96% in air
- Delivery: Passivated steel cylinders with real-time TDLAS monitoring
Product Specifications
CAS Number: 7803-62-5
UN Number: 2203
EINECS Number: 232-2632-4
Molecular Weight: 32.117
Appearance: Colorless, with a garlic smell
Melting Point: -185 °C
Boiling Point: -112 °C
Density: 1.34 kg/m³
DOT Class: 2.1
Label: Flammable Gas
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